This paper describes the maskless wiring formation technology not using photomask and photoresist,development of metal nano particle and nano ink,application of the inkjet method and future theme.
概述了不使用光致掩模和光致抗蚀剂的无掩模布线形成技术,金属纳米粒子和纳米油墨的研究开发,喷墨法的应用和今后的课题。
