A new anodic oxidation method consisting of such three steps as small constant current electrochemical etching, pulse anodic oxidation and constant voltage annealing are used to passivate the surface of MCT infrared detector.
采用小电流腐蚀、脉冲电流钝化、恒压退火的分步式阳极氧化钝化新方法对碲镉汞红外探测器进行表面钝化,利用扫描电镜(SEM)、俄歇电子能谱(AES)对传统恒流方法和新方法生成的两种阳极氧化膜进行测试比较。
