An analytical method of trace element chloride in cleaning products by inductively coupled plasma-mass sepectrometry(ICP-MS)was studied.
研究了利用电感耦合等离子体质谱仪测定无尘产品中的痕量杂质元素氯含量的方法,检测下限0。
This article introduces the AB SLC500 PLC applied in the clean room control system in semiconductor plant.
本文详细介绍了AB-SLC500 PLC在无尘室系统控制中的应用、软硬件配置等。