In this thesis, we focus on dual axis capacitance vibration transducer, which was fabricated by Micro-electromechanical Systems (MEMS).
本论文研究了采用微机械加工技术(MEMS)制作的双轴电容式振动传感器,其基本工作原理是利用惯性质量块在外界加速度的作用下与检测电极间的空隙发生改变,从而引起等效电容的变化来测定振动加速度的。
The main structure and working principle of the twin-shaft horizontal TMR mixer was discussed in the paper.
本文介绍了作者设计并研制的双轴卧式全混合日粮混合机,阐述了其主要结构及工作原理。